Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676792 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Youfei Jiang, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2023-06-13 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Xinan Luo, Xuedong Liu, Weiming Ren | 2023-03-28 |