Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837931 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Dave Braaksma, Peter Michel Silvester Maria Heijmans, Christiaan Alexander Hoogendam | 2023-12-05 |
| 11621142 | Substrate positioning device and electron beam inspection tool | Marcel Koenraad Marie Baggen, Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Sven Antoin Johan Hol +3 more | 2023-04-04 |