Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837931 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Dave Braaksma, Christiaan Alexander Hoogendam | 2023-12-05 |