Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2023-10-10 |
| 11740560 | Method for determining an inspection strategy for a group of substrates in a semiconductor manufacturing process | Eleftherios KOULIERAKIS, Carlo LANCIA, Juan Manuel Gonzalez Huesca, Dimitra GKOROU, Reza SAHRAEIAN | 2023-08-29 |
| 11714357 | Method to predict yield of a device manufacturing process | Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more | 2023-08-01 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2023-02-28 |
| 11579534 | Extracting a feature from a data set | Maialen LARRANAGA, Dimitra GKOROU, Faegheh Hasibi | 2023-02-14 |