Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Erik Johannes Maria Wallerbos +8 more | 2023-10-10 |
| 11669017 | Method for controlling a manufacturing apparatus and associated apparatuses | Roy Werkman, Bijoy Rajasekharan, Jochem Sebastiaan Wildenberg, Ronald Van Ittersum, Pieter Gerardus Jacobus SMORENBERG +3 more | 2023-06-06 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Erik Johannes Maria Wallerbos +8 more | 2023-02-28 |