Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823866 | Thin film forming method | SungKyu Kang, Younghoon Kim, HieChul Kim, KyungEun Lee, TaeHee Yoo | 2023-11-21 |
| 11676812 | Method for forming silicon nitride film selectively on top/bottom portions | Dai Ishikawa, Atsuki Fukazawa, Eiichiro Shiba, Shinya Ueda, Taishi Ebisudani +4 more | 2023-06-13 |