Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827981 | Method of depositing material on stepped structure | Kentaro Kojima, Takeru Kuwano | 2023-11-28 |
| 11821078 | Method for forming precoat film and method for forming silicon-containing film | Takeru Kuwano, Toshikazu Hamada, Yoshinori Ota | 2023-11-21 |
| 11676812 | Method for forming silicon nitride film selectively on top/bottom portions | Dai Ishikawa, Atsuki Fukazawa, Shinya Ueda, Taishi Ebisudani, SeungJu Chun +4 more | 2023-06-13 |