Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827981 | Method of depositing material on stepped structure | Kentaro Kojima, Eiichiro Shiba | 2023-11-28 |
| 11821078 | Method for forming precoat film and method for forming silicon-containing film | Eiichiro Shiba, Toshikazu Hamada, Yoshinori Ota | 2023-11-21 |