Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676812 | Method for forming silicon nitride film selectively on top/bottom portions | Dai Ishikawa, Atsuki Fukazawa, Eiichiro Shiba, Shinya Ueda, SeungJu Chun +4 more | 2023-06-13 |