Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1005974 | Gas distributor for semiconductor manufacturing apparatus | Jaehyun Kim, Jeongho Lee | 2023-11-28 |
| D990441 | Gas flow control plate | Jeongho Lee, DaeYoun Kim, Jaehyun Kim, Taewoong Kim | 2023-06-27 |
| D981973 | Reactor wall for substrate processing apparatus | Jaehyun Kim, Jeongho Lee, Jongsu Kim | 2023-03-28 |
| D980813 | Gas flow control plate for substrate processing apparatus | Jaehyun Kim, Jeongho Lee, HyunSoo Jang | 2023-03-14 |
| D980814 | Gas distributor for substrate processing apparatus | Jaehyun Kim, Jeongho Lee, HyunSoo Jang | 2023-03-14 |