Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980813 | Gas flow control plate for substrate processing apparatus | JinHo Shin, Jaehyun Kim, Jeongho Lee | 2023-03-14 |
| D980814 | Gas distributor for substrate processing apparatus | JinHo Shin, Jaehyun Kim, Jeongho Lee | 2023-03-14 |