Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D990441 | Gas flow control plate | Jeongho Lee, JinHo Shin, Jaehyun Kim, Taewoong Kim | 2023-06-27 |
| 11664199 | Substrate processing apparatus and substrate processing method | JaeMin Roh, JulIl Lee, Changmin Lee | 2023-05-30 |