Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767589 | Substrate processing device | — | 2023-09-26 |
| 11664199 | Substrate processing apparatus and substrate processing method | DaeYoun Kim, JulIl Lee, Changmin Lee | 2023-05-30 |
| 11664267 | Substrate support assembly and substrate processing device including the same | Julll Lee, GunYong Park | 2023-05-30 |