Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664267 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, GunYong Park | 2023-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664267 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, GunYong Park | 2023-05-30 |