Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Eric James Shero, Todd Robert Dunn, William George Petro, Jereld Lee Winkler +1 more | 2023-11-28 |
| 11773486 | Solid source sublimator | Eric James Shero, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-10-03 |
| 11773485 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Mohith Verghese | 2023-10-03 |
| 11742189 | Multi-zone reactor, system including the reactor, and method of using the same | Mohith Verghese, Eric James Shero, Todd Robert Dunn | 2023-08-29 |
| 11634812 | Solid source sublimator | Eric James Shero, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-04-25 |
| 11626313 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue | 2023-04-11 |
| 11624113 | Heating zone separation for reactant evaporation system | Eric James Shero, Kyle Fondurulia | 2023-04-11 |
| 11584990 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Mohith Verghese | 2023-02-21 |
| 11578406 | Ampoule for a semiconductor manufacturing precursor | Mohith Verghese, David Marquardt, Jose Alexandro Romero | 2023-02-14 |