Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Carl Louis White, Todd Robert Dunn, William George Petro, Jereld Lee Winkler +1 more | 2023-11-28 |
| 11791153 | Deposition of hafnium oxide within a high aspect ratio hole | Jiyeon Kim, Petri Raisanen, Sol Kim, Ying-Shen Kuo, Michael Schmotzer +1 more | 2023-10-17 |
| 11773486 | Solid source sublimator | Carl Louis White, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-10-03 |
| 11742198 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Shankar Swaminathan | 2023-08-29 |
| 11742189 | Multi-zone reactor, system including the reactor, and method of using the same | Carl Louis White, Mohith Verghese, Todd Robert Dunn | 2023-08-29 |
| 11634812 | Solid source sublimator | Carl Louis White, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-04-25 |
| 11624113 | Heating zone separation for reactant evaporation system | Carl Louis White, Kyle Fondurulia | 2023-04-11 |