Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834740 | Apparatus, system, and method for generating gas for use in a process chamber | — | 2023-12-05 |
| 11773485 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, Mohith Verghese | 2023-10-03 |
| 11584990 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, Mohith Verghese | 2023-02-21 |
| 11578406 | Ampoule for a semiconductor manufacturing precursor | Carl Louis White, Mohith Verghese, Jose Alexandro Romero | 2023-02-14 |