Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11795545 | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same | — | 2023-10-24 |
| 11629406 | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate | Mohith Verghese, Todd Robert Dunn | 2023-04-18 |
| 11626313 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia | 2023-04-11 |