Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821087 | Vaporization vessel and method | Scott L. Battle, David James Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales +2 more | 2023-11-21 |
| 11804375 | Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt | Sangbum Han, Seobong Chang, Jaeeon Park, Thomas H. Baum | 2023-10-31 |
| 11761081 | Methods for depositing tungsten or molybdenum films | Robert Wright, Jr., Thomas H. Baum, Shawn D. Nguyen, Han Wang, Philip S. H. Chen | 2023-09-19 |
| 11746413 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg | 2023-09-05 |
| 11621148 | Plasma immersion methods for ion implantation | Ying Tang, Oleg Byl, Sharad N. Yedave | 2023-04-04 |
| 11560625 | Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor | Robert Wright, Jr., Shuang Meng, Thomas H. Baum, Philip S. H. Chen | 2023-01-24 |