Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807653 | Group VI precursor compounds | David M. Ermert, Thomas H. Baum | 2023-11-07 |
| 11761081 | Methods for depositing tungsten or molybdenum films | Thomas H. Baum, Bryan C. Hendrix, Shawn D. Nguyen, Han Wang, Philip S. H. Chen | 2023-09-19 |
| 11746413 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Bryan C. Hendrix, Scott L. Battle, John N. Gregg | 2023-09-05 |
| 11624111 | Method for etching or deposition | Thomas H. Baum, David M. Ermert | 2023-04-11 |
| 11560625 | Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor | Shuang Meng, Bryan C. Hendrix, Thomas H. Baum, Philip S. H. Chen | 2023-01-24 |