TB

Thomas H. Baum

EN Entegris: 8 patents #1 of 121Top 1%
Overall (2023): #11,485 of 537,848Top 3%
8
Patents 2023

Issued Patents 2023

Showing 1–8 of 8 patents

Patent #TitleCo-InventorsDate
11807653 Group VI precursor compounds David M. Ermert, Robert Wright, Jr. 2023-11-07
11804375 Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt Sangbum Han, Seobong Chang, Bryan C. Hendrix, Jaeeon Park 2023-10-31
11761081 Methods for depositing tungsten or molybdenum films Robert Wright, Jr., Bryan C. Hendrix, Shawn D. Nguyen, Han Wang, Philip S. H. Chen 2023-09-19
11761086 Cobalt precursors Scott L. Battle, John M. Cleary, David W. Peters, Philip S. H. Chen 2023-09-19
11685752 Process for preparing organotin compounds David M. Ermert, Thomas M. Cameron 2023-06-27
11624111 Method for etching or deposition Robert Wright, Jr., David M. Ermert 2023-04-11
11560397 Group VI precursor compounds David M. Ermert 2023-01-24
11560625 Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor Robert Wright, Jr., Shuang Meng, Bryan C. Hendrix, Philip S. H. Chen 2023-01-24