Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827973 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Sharad N. Yedave | 2023-11-28 |
| 11682540 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney | 2023-06-20 |
| 11621148 | Plasma immersion methods for ion implantation | Ying Tang, Bryan C. Hendrix, Sharad N. Yedave | 2023-04-04 |