Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Jonathan D. Fischer | 2022-12-27 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Jonathan D. Fischer | 2022-04-26 |