Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone, Steven M. Anella +2 more | 2022-10-18 |
| 11302536 | Deflectable platens and associated methods | Ming Yin | 2022-04-12 |