Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Julian G. Blake, Michael W. Osborne, Steven M. Anella, Jonathan D. Fischer | 2022-12-27 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Dale K. Stone, Lyudmila Stone, Steven M. Anella +2 more | 2022-10-18 |
| 11362233 | Electrical readout optical sensor | Long Wen, Baojun Li | 2022-06-14 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Julian G. Blake, Michael W. Osborne, Steven M. Anella, Jonathan D. Fischer | 2022-04-26 |
| 11228215 | System of a conductor disposed within an insulator | Christopher Michael Calebrese, Jeffrey S. Sullivan, Benjamin Hale Winkler, Kevin Warner Flanagan, Anil Raj Duggal | 2022-01-18 |