Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Steven M. Anella, Jonathan D. Fischer | 2022-12-27 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Steven M. Anella, Jonathan D. Fischer | 2022-04-26 |