Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Steven M. Anella +2 more | 2022-10-18 |
| 11222768 | Foam in ion implantation system | James Alan Pixley, Eric D. Hermanson, Philip Layne, Thomas Stacy | 2022-01-11 |