Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410867 | Electrostatic chuck | Hitoshi Sasaki | 2022-08-09 |
| 11410868 | Electrostatic chuck | Masaki Sato, Ikuo Itakura, Shuichiro Saigan, Jun Shiraishi, Kouta KOBAYASHI | 2022-08-09 |
| 11328906 | Electrostatic chuck | Hitoshi Sasaki | 2022-05-10 |
| 11328907 | Electrostatic chuck | Hitoshi Sasaki | 2022-05-10 |
| 11302559 | Electrostatic chuck | Minoru Suzuki, Hitoshi Sasaki, Tsukasa Shigezumi | 2022-04-12 |
| 11302560 | Electrostatic chuck | Minoru Suzuki, Hitoshi Sasaki, Tsukasa Shigezumi | 2022-04-12 |