Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302559 | Electrostatic chuck | Yutaka MOMIYAMA, Minoru Suzuki, Hitoshi Sasaki | 2022-04-12 |
| 11302560 | Electrostatic chuck | Yutaka MOMIYAMA, Minoru Suzuki, Hitoshi Sasaki | 2022-04-12 |