Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417556 | Electrostatic chuck and processing apparatus | Jun Shiraishi, Tatsuya Mori, Masahiro Watanabe, Yuki Sasaki | 2022-08-16 |
| 11410868 | Electrostatic chuck | Masaki Sato, Ikuo Itakura, Jun Shiraishi, Yutaka MOMIYAMA, Kouta KOBAYASHI | 2022-08-09 |
| 11393708 | Electrostatic chuck | Masafumi IKEGUCHI, Tetsuro ITOYAMA, Jun Shiraishi | 2022-07-19 |
| 11309204 | Electrostatic chuck | Jun Shiraishi, Tatsuya Mori, Masahiro Watanabe | 2022-04-19 |
| 11276602 | Electrostatic chuck and processing apparatus | Jun Shiraishi, Tatsuya Mori, Masahiro Watanabe, Yuki Sasaki | 2022-03-15 |