Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410868 | Electrostatic chuck | Masaki Sato, Shuichiro Saigan, Jun Shiraishi, Yutaka MOMIYAMA, Kouta KOBAYASHI | 2022-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410868 | Electrostatic chuck | Masaki Sato, Shuichiro Saigan, Jun Shiraishi, Yutaka MOMIYAMA, Kouta KOBAYASHI | 2022-08-09 |