Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Suguru Enokida +2 more | 2022-10-18 |
| 11465168 | Liquid processing device and liquid processing method | Hiroyuki Ide, Hideo Shite | 2022-10-11 |
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2022-05-24 |
| 11235350 | Solution treatment apparatus and cleaning method for solution treatment apparatus | Satoshi Shimmura, Yuji Sakai | 2022-02-01 |