Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273464 | Substrate processing apparatus | Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Kenji Yada, Hiroichi Inada +2 more | 2022-03-15 |
| 11235350 | Solution treatment apparatus and cleaning method for solution treatment apparatus | Yuji Sakai, Kousuke Yoshihara | 2022-02-01 |