Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2022-05-24 |
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Kenji Yada, Hiroichi Inada +2 more | 2022-03-15 |