Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Kenji Yada +2 more | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Kenji Yada +2 more | 2022-03-15 |