Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |