Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |
| 11469116 | Substrate processing apparatus and substrate processing method | Shoichiro Hidaka, Boui Ikeda, Kazuya Iwanaga, Masato Hayashi | 2022-10-11 |