Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469116 | Substrate processing apparatus and substrate processing method | Boui Ikeda, Eiichi Sekimoto, Kazuya Iwanaga, Masato Hayashi | 2022-10-11 |
| 11430662 | Substrate processing method and substrate processing apparatus | — | 2022-08-30 |