Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469116 | Substrate processing apparatus and substrate processing method | Shoichiro Hidaka, Eiichi Sekimoto, Kazuya Iwanaga, Masato Hayashi | 2022-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469116 | Substrate processing apparatus and substrate processing method | Shoichiro Hidaka, Eiichi Sekimoto, Kazuya Iwanaga, Masato Hayashi | 2022-10-11 |