Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492700 | Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber | Wen-Hao Cheng, Yen-Yu Chen | 2022-11-08 |
| 11387123 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin | 2022-07-12 |
| 11367644 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2022-06-21 |