Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387123 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2022-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387123 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2022-07-12 |