Issued Patents 2022
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513083 | Photolithography method and photolithography system | Wei Chang Cheng | 2022-11-29 |
| 11508602 | Cleaning tool | Yueh-Lin Yang | 2022-11-22 |
| 11448955 | Mask for lithography process and method for manufacturing the same | Yueh-Lin Yang | 2022-09-20 |
| 11435669 | Radiation source supply system for lithographic tools | Yueh-Lin Yang | 2022-09-06 |
| 11409201 | Substrate measuring device and a method of using the same | Min-Cheng Wu | 2022-08-09 |
| 11409200 | Substrate measuring device and a method of using the same | Min-Cheng Wu | 2022-08-09 |
| 11367644 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Yi-Ming Dai, Yueh-Lin Yang | 2022-06-21 |
| 11302566 | Wafer table with dynamic support pins | Min-Cheng Wu | 2022-04-12 |
| 11287751 | System and method for lens heating control | Yueh-Lin Yang | 2022-03-29 |
| 11269261 | Particle removal from wafer table and photomask | Min-Cheng Wu | 2022-03-08 |
| 11256181 | Apparatus and method for removing particles in semiconductor manufacturing | Yueh-Lin Yang | 2022-02-22 |
| 11243478 | System and method for thermal management of reticle in semiconductor manufacturing | Yueh-Lin Yang | 2022-02-08 |
| 11237483 | Method and apparatus for controlling droplet in extreme ultraviolet light source | Yueh-Lin Yang | 2022-02-01 |
| 11229111 | Method of operating semiconductor apparatus and semiconductor apparatus | Po-Ming SHIH | 2022-01-18 |
| 11221563 | Lens control for lithography tools | Yueh-Lin Yang | 2022-01-11 |
| 11217475 | Wafer table with dynamic support pins | Min-Cheng Wu | 2022-01-04 |