Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409200 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2022-08-09 |
| 11409201 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2022-08-09 |
| 11302566 | Wafer table with dynamic support pins | Chi-Hung Liao | 2022-04-12 |
| 11269261 | Particle removal from wafer table and photomask | Chi-Hung Liao | 2022-03-08 |
| 11217475 | Wafer table with dynamic support pins | Chi-Hung Liao | 2022-01-04 |