Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508602 | Cleaning tool | Chi-Hung Liao | 2022-11-22 |
| 11448955 | Mask for lithography process and method for manufacturing the same | Chi-Hung Liao | 2022-09-20 |
| 11435669 | Radiation source supply system for lithographic tools | Chi-Hung Liao | 2022-09-06 |
| 11398693 | Card edge connector | Che-Ting Wu, Guo Chen | 2022-07-26 |
| 11367644 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yi-Ming Dai | 2022-06-21 |
| 11287751 | System and method for lens heating control | Chi-Hung Liao | 2022-03-29 |
| D945372 | Electrical connector | Chih-Wei Chen, Shin-Tai Ho, Yu-Hsiung Lin | 2022-03-08 |
| 11256181 | Apparatus and method for removing particles in semiconductor manufacturing | Chi-Hung Liao | 2022-02-22 |
| 11243478 | System and method for thermal management of reticle in semiconductor manufacturing | Chi-Hung Liao | 2022-02-08 |
| 11237483 | Method and apparatus for controlling droplet in extreme ultraviolet light source | Chi-Hung Liao | 2022-02-01 |
| 11221563 | Lens control for lithography tools | Chi-Hung Liao | 2022-01-11 |