Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476108 | Spin on carbon composition and method of manufacturing a semiconductor device | Jing Hong Huang, Ching-Yu Chang | 2022-10-18 |
| 11422465 | Extreme ultraviolet photoresist with high-efficiency electron transfer | Chin-Hsiang Lin, Chien-Wei Wang | 2022-08-23 |
| 11295961 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Ching-Yu Chang, Chin-Hsiang Lin | 2022-04-05 |
| 11269256 | Underlayer material for photoresist | An-Ren Zi, Ching-Yu Chang | 2022-03-08 |