Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448956 | EUV mask | Ching-Huang Chen, Chi-Yuan Sun, Hua-Tai Lin, Hsin-Chang Lee | 2022-09-20 |
| 11442356 | Lithography mask with an amorphous capping layer | Hsin-Chang Lee, Pei-Cheng Hsu, Chih-Tao Chien, Ta-Cheng Lien | 2022-09-13 |
| 11403728 | Automatic adjusting method for equipment and smart adjusting device using the same | Yu-Chi Lin, Li Yang, Ching-Pei Lin, Wei Zhu | 2022-08-02 |
| 11287754 | Mask blank for lithography and method of manufacturing the same | Hsin-Chang Lee, Ping-Hsun Lin | 2022-03-29 |