Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499219 | Method of fabricating thin film with varying thickness | Cheng-Sheng Huang, Chi-Yung Hsieh, Chih-Chung Wu, Chi-Fang Huang | 2022-11-15 |
| 11499937 | Gas sensor | Hsiao-Wen Zan, Hsin-Fei Meng, Shang-Yu Yu, Ting-Wei Tung, Yi Wu +1 more | 2022-11-15 |
| 11403728 | Automatic adjusting method for equipment and smart adjusting device using the same | Li Yang, Ching-Pei Lin, Ming-Wei Chen, Wei Zhu | 2022-08-02 |
| 11227747 | Etch process with rotatable shower head | Yi-Wei Chiu, Hung Jui Chang, Chin-Hsing Lin, Yu Lun Ke | 2022-01-18 |
| 11222805 | Etching apparatus and methods of cleaning thereof | Huai-Tei Yang, Lun-Kuang Tan, Wei-Jen Lo, Chih-Teng Liao | 2022-01-11 |