Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335593 | Interconnect structure of semiconductor device including barrier layer located entirely in via | Bo-Jhih Shen, Yi-Wei Chiu | 2022-05-17 |
| 11227747 | Etch process with rotatable shower head | Yu-Chi Lin, Yi-Wei Chiu, Chin-Hsing Lin, Yu Lun Ke | 2022-01-18 |