Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532481 | Fin field-effect transistor device and method of forming | Yu-Li Lin, Jui Fu Hsieh, Chih Hsuan Cheng, Tzu-Chan Weng | 2022-12-20 |
| 11522050 | Method of manufacturing a semiconductor device and a semiconductor device | Jui Fu Hsieh, Chih-Shan Chen, Yi-Jen Chen, Tzu-Chan Weng | 2022-12-06 |
| 11488912 | Method for forming recesses in a substrate by etching dummy fins | Wan-Chun Kuan, Yi-Wei Chiu, Tzu-Chan Weng | 2022-11-01 |
| 11430893 | Method of manufacturing a semiconductor device and a semiconductor device | Yan-Ting Shen, Chia-Chi Yu, Yu-Li Lin, Chih Hsuan Cheng, Tzu-Chan Weng | 2022-08-30 |
| 11328931 | Method of manufacturing a semiconductor device | En-Ping Lin, Yu-Ling Ko, I-Chung W. Wang, Yi-Jen Chen, Sheng-Kai Jou | 2022-05-10 |
| 11282944 | Method of manufacturing a semiconductor device and a semiconductor device | Chia-Chi Yu, Jui Fu Hseih, Yu-Li Lin, Yi-Jen Chen | 2022-03-22 |
| 11222805 | Etching apparatus and methods of cleaning thereof | Yu-Chi Lin, Huai-Tei Yang, Lun-Kuang Tan, Wei-Jen Lo | 2022-01-11 |