Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525072 | Materials and methods for chemical mechanical polishing of ruthenium-containing materials | An-Hsuan Lee, Shen-Nan Lee, Chen-Hao Wu, Teng-Chun Tsai, Huang-Lin Chao | 2022-12-13 |
| 11495471 | Slurry compositions for chemical mechanical planarization | An-Hsuan Lee, Chen-Hao Wu, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao | 2022-11-08 |
| 11286922 | Miniature piezoelectric pump module | Hao-Jan Mou, Shen-Wen Chen, Shih-Chang Chen, Chi-Feng Huang, Yung-Lung Han +1 more | 2022-03-29 |
| 11267987 | Chemical mechanical polishing slurry composition and method of polishing metal layer | An-Hsuan Lee, Shen-Nan Lee, Teng-Chun Tsai, Chen-Hao Wu, Huang-Lin Chao | 2022-03-08 |